Focused Ion Beams. Thin Film Growth by Low Energy Focused Ion Beam.

Focused Ion Beam Lithography

Characterization of Diamond-Like Film after Focused Ion Beam Processing

Optical properties (transmission and refractive index) and chemical structure (XPS) of diamond-like coating (DLC) film before and after focused ion beam milling (FIBM) process, were investigated in this paper. It is shown by our FIBM experiment that influence of FIBM on Optical properties and chemical structure of the DLC film is not apparent, especially in near-infra region. The film still ca...

A Thin Film Preparation Using Focused High Power Ion

Among the well known physical methods of thin film preparation as target evaporation by magnetron irradiation, by laser, electron and long pulse ion beams, the method of precipitation of evaporated target material with short pulse ( < 100 ns) and high power (>10 W/cm) ion beam seems to be less investigated. The advantages of such method are: 1. high precipitation velocity ( 1 Jlm per shot); 2. ...

Focused ion beam induced deflections of freestanding thin films.

Prominent deflections are shown to occur in freestanding silicon nitride thin membranes when exposed to a 50 keV gallium focused ion beam for ion doses between 10(14) and 10(17) ions/cm(2). Atomic force microscope topographs were used to quantify elevations on the irradiated side and corresponding depressions of comparable magnitude on the back side, thus indicating that what at first appeared ...

Sub-micron grating fabrication on hafnium oxide thin-film waveguides with focused ion-beam milling.

Uniform period sub-micron gratings have been fabricated using focused ion beam milling on hafnium oxide waveguides. Atomic force microscopy indicates that the gratings have smooth and uniform profiles. At the period of 330 nm, the largest peak-to-peak height that was achieved was 85 nm. Scattering at the grating imperfections was found to be at least two orders of magnitude weaker than the inte...